Diameter: 2" (50.8±0.5mm) or (50.0±0.5mm) 3" (76.2±0.5mm)
Orientation: < 100> ±0.1° or < 111> ±0.1° or < 110> ±0.1°
Thickness: 350±20μm or as specified
Flats: US or EJ (15±2.0 mm / 8±2.0 mm)
Surface finish: Single side polished or double side polished